MEMS ion-sorption high vacuum pump

MEMS Micro-vacuum Pump for Portable Gas Analyzers

There are many advantages to miniaturizing systems for chemical and biological analysis. Recent interest in this area has led to the cre ation of several research programs, including a Micro Gas Analyzer (MGA) project at MIT. The goal of this project is to develop an inexpensive, portable, real-time, and low-power approach for detect ing chemical and biological agents. Elements entering the MGA...

Emergency power source for an ion vacuum pump.

This note describes a simple high-voltage dc generator which serves as an emergency power source for an ion vacuum pump during power interruptions, or failure of the main supply.

High and Moderate-Level Vacuum Packaging of Vibratory MEMS

We report vacuum packaging procedures for low-stress die attachment and versatile hermetic sealing of resonant MEMS. The developed in-house infrastructure allows for both high and moderate-level vacuum packaging addressing the requirements of various applications. Prototypes of 100 μm silicon-on-insulator Quadruple Mass Gyroscopes (QMGs) were packaged using the developed process with and withou...

Vacuum Gauge to Vacuum Pump Valve

Sorption Ion Exchange

The case of a sorption process considered here involves a solid phase (sorbent) and a liquid phase (solvent, normally water) containing a dissolved species to be sorbed (sorbate, e.g. metal ions). Due to the higher ‘affinity’ of the sorbent for the sorbate species the latter is attracted into the solid and bound there by different mechanisms. This process takes place until an equilibrium is est...